Cleaning substrates and subsequent deposition of coatings with coaxial magnetron discharge
نویسندگان
چکیده
The created experimental magnetron sputtering system allows preliminary cleaning of the substrate surface and subsequent deposition coatings on long cylindrical products within a single using coaxial discharge at working gas pressure 150 mTorr. coating has reverse electrodes polarity relative to discharge. A theoretical calculation parameters been carried out.
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ژورنال
عنوان ژورنال: Journal of physics
سال: 2021
ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']
DOI: https://doi.org/10.1088/1742-6596/1954/1/012015